Name: 1200°C Max. 5" Rotary PE-CVD Tube Furnace w/ Feeding & Receiving - OTF-1200X-III-R5-PECVD
Brand: MTI Online Store
SKU: 5-rotary-tube-furnace-w-feeding-receiving-for-powder-pe-cvd-cleaning-otf-1200x-iii-r5-pecvd
Availability: InStock

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1200°C Max. 5" Rotary PE-CVD Tube Furnace w/ Feeding & Receiving - OTF-1200X-III-R5-PECVD

$69,993.00

Original: $199,980.00

-65%

1200°C Max. 5" Rotary PE-CVD Tube Furnace w/ Feeding & Receiving - OTF-1200X-III-R5-PECVD—

$199,980.00

$69,993.00

Original: $199,980.00

-65%

1200°C Max. 5" Rotary PE-CVD Tube Furnace w/ Feeding & Receiving - OTF-1200X-III-R5-PECVD—

$199,980.00

$69,993.00

The Story

OTF-1200X-III-R5-PECVD is a 1200°C plasma-enhanced three-zone rotary furnace for chemical vapor deposition (PECVD). It is designed for powder surface coating, e.g. core-shell particles, and powder surface cleaning. With the automatic powder feeding and collection system, it can simulate the powder coating manufacturing process on lab-scale equipment. It can also be used as plasma cleaning for powder

Features

Plasma-enhanced CVD with 13.56 MHz RF power supply
Three-zone rotary furnace with a heating length of 600 mm
Tumbling volume: 5000 ml. Effective volume @ 20-25%
2-liter stainless steel powder feeding and collection system
Gas mixers with 4-channel MFCs
Optional PC and touchscreen remote control

SPECIFICATIONS:

Power	Furnace 208-240VAC, single phase, 50/60Hz, 4 kW RF power supply 208-240VAC, single phase, 50/60Hz, 0.5 kW Powder feeder 24VDC, 120 VAC, or 208-240VAC, single phase, 50/60Hz, 50W Gas mixer 110-240VAC, single phase, 50/60 Hz, 50 W Vacuum pump (optional): power is dependent upon the pumping capacity.
3-zone Rotary Furnace	Working temperature ≤1100ºC Heating rate ≤10°C/min Heating element NiCrAl: Mo Heating length 600 mm (150+300+150 mm three zones) Temperature control PID temperature control Temp control accuracy ±1°C Rotary speed 2-10 rpm Tilting angle 0-15°
Rotary Tube and Flange	Quartz tube Ø60×Ø130×1650 mm with mixing blades Stainless steel magnetic fluid sealed swivels with gas inlet/outlet and KF25 or KF40 vacuum port
Plasma RF Power Supply	Output Power 5 -300W adjustable with ± 1% stability. RF frequency 13.56 MHz ±0.005% Automatic RF matching Noise: <50 dB. Cooling: Air cooling.
Gas Mixing Station	GSL-4Z-LCD Touchscreen LCD monitor Four mass flow controllers MFC 1 1-500 sccm oxygen MFC 2 1-500 sccm nitrogen MFC 3 1-500 sccm hydrogen MFC 4 1-500 sccm argon Accuracy ±1.5% F.S. Port size 1/4" compression tube fitting
Powder Feeder and Collection Tank	Powder feeder PF-1S, a motorized stainless steel powder feeder with built-in vibration. The estimated feeding rate is about 0- 97 ml/minute. A stainless steel collection tank ( 2 Liter capacity ) is to collect powder without exposure to air.
Laptop, software Control (Optional)	The software will integrate temperature control, gas MFC control, and Plasma control for remote operation
Compliance	CE Certified