1200°C Microwave Plasma Assisted CVD Rotary Furnace w/ 2" Tube - GSL-1200R-MWPE
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1200°C Microwave Plasma Assisted CVD Rotary Furnace w/ 2" Tube - GSL-1200R-MWPE

1200°C Microwave Plasma Assisted CVD Rotary Furnace w/ 2" Tube - GSL-1200R-MWPE

$8,743.00

Original: $24,980.00

-65%
1200°C Microwave Plasma Assisted CVD Rotary Furnace w/ 2" Tube - GSL-1200R-MWPE—

$24,980.00

$8,743.00

The Story

GSL-1200R-MWPE is an MPCVD (microwave-assisted CVD) rotary furnace. It integrates the 2.45GHz microwave generator and 2" rotary processing tube ( 0-5 rpm) with vacuum-sealed flanged to provide stable plasma from 800oC to 1200oC under ~4.5 torr vacuum. It is designed to fast calcine powder and form the core-shell structure for powder in battery research.

SPECIFICATIONS:
Power
  • Total 2000W 
  • 208-240VAC, Single phase, 50/60Hz
Microwave
  • Frequency: 2.45 GHz ±25 MHz
  • Power Output: 1400W
  • Microwave leaking: ≤ 3 mW/cm² at 1 meter away. 
  • One digital power controller is built in to adjust output power from 10 - 100%
 Heating Module and
Processing Tube
  • Ni-Cr-Al wire heating coin with 80 mm ID is installed inside a fibrous alumina module (Pic. 1)
  • The heating coil is placed inside the microwave chamber
  • 2"  Fused quartz processing tube with a mixing blade in the center (Pic. 2 and Pic.3)
  • Furnace Heating Module for GSL-1100X using 2'' tube,EQ-GSL1100-Module-110VPic1. Pic.2 Pic.3
Flanges & Vacuum
  • One pair of vacuum flange is included to seal the quartz tube
    • KF25 vacuum port and 1/4 gas inlet and outlet with needle valves are built-in the flange ( Pic. 1)
  • One digital vacuum gauge is included for vacuum control ( Pic. 2)
  • Max. Vacuum level: 10-2 torr by dry pump and 10-5 torr by turbopump.
  • The pump is not included. Please click Pic. 3 to order separately. For CVD application, suggest choosing a dry pump.
Pic. 1 Pic. 2 Pic.3

Inline Swivel &
Rotary Speed
 
  • Two Inline Swivel Gas Fittings are included and connected to flanges, which allows gas pipe in place when the tube rotating
  • Rotation speed: Tube rotation is driven by a DC motor with a speed range of 1- 5 rpm variable
  • A 1/4" gas tube is required to connect the Inline Swivel Gas Fittings to the gas tank
  • Click the picture left to see detailed specs

 Working Temperature
  • Max. 1200ºC < 30 minutes with heating module assisted
  • Min. 800ºC with heating module assisted
  • ≤1100ºC continuous with heating module assisted and Plasma
  • Heating rate: 1 ~20°C / min programmable
  • ~750ºC heating by microwave only without temperature control

 Temperature Controller
  • 30 segments programmable for heating rate, dwell temperature and time, and cooling rate
  • SCR temperature control
  • Over-temperature and thermal couple broken protection
  • Control accuracy +/-1.0 ºC
  • K-type thermal couple inserted through the flange
Compliance
  • CE Certified
  • NRTL or CSA certification is available upon request

 

1200°C Microwave Plasma Assisted CVD Rotary Furnace w/ 2" Tube - GSL-1200R-MWPE - Image 2

Details & Craftsmanship

Every detail has been carefully considered to bring you the perfect product.

1200°C Microwave Plasma Assisted CVD Rotary Furnace w/ 2" Tube - GSL-1200R-MWPE - Image 3

Details & Craftsmanship

Every detail has been carefully considered to bring you the perfect product.

Description

GSL-1200R-MWPE is an MPCVD (microwave-assisted CVD) rotary furnace. It integrates the 2.45GHz microwave generator and 2" rotary processing tube ( 0-5 rpm) with vacuum-sealed flanged to provide stable plasma from 800oC to 1200oC under ~4.5 torr vacuum. It is designed to fast calcine powder and form the core-shell structure for powder in battery research.

SPECIFICATIONS:
Power
  • Total 2000W 
  • 208-240VAC, Single phase, 50/60Hz
Microwave
  • Frequency: 2.45 GHz ±25 MHz
  • Power Output: 1400W
  • Microwave leaking: ≤ 3 mW/cm² at 1 meter away. 
  • One digital power controller is built in to adjust output power from 10 - 100%
 Heating Module and
Processing Tube
  • Ni-Cr-Al wire heating coin with 80 mm ID is installed inside a fibrous alumina module (Pic. 1)
  • The heating coil is placed inside the microwave chamber
  • 2"  Fused quartz processing tube with a mixing blade in the center (Pic. 2 and Pic.3)
  • Furnace Heating Module for GSL-1100X using 2'' tube,EQ-GSL1100-Module-110VPic1. Pic.2 Pic.3
Flanges & Vacuum
  • One pair of vacuum flange is included to seal the quartz tube
    • KF25 vacuum port and 1/4 gas inlet and outlet with needle valves are built-in the flange ( Pic. 1)
  • One digital vacuum gauge is included for vacuum control ( Pic. 2)
  • Max. Vacuum level: 10-2 torr by dry pump and 10-5 torr by turbopump.
  • The pump is not included. Please click Pic. 3 to order separately. For CVD application, suggest choosing a dry pump.
Pic. 1 Pic. 2 Pic.3

Inline Swivel &
Rotary Speed
 
  • Two Inline Swivel Gas Fittings are included and connected to flanges, which allows gas pipe in place when the tube rotating
  • Rotation speed: Tube rotation is driven by a DC motor with a speed range of 1- 5 rpm variable
  • A 1/4" gas tube is required to connect the Inline Swivel Gas Fittings to the gas tank
  • Click the picture left to see detailed specs

 Working Temperature
  • Max. 1200ºC < 30 minutes with heating module assisted
  • Min. 800ºC with heating module assisted
  • ≤1100ºC continuous with heating module assisted and Plasma
  • Heating rate: 1 ~20°C / min programmable
  • ~750ºC heating by microwave only without temperature control

 Temperature Controller
  • 30 segments programmable for heating rate, dwell temperature and time, and cooling rate
  • SCR temperature control
  • Over-temperature and thermal couple broken protection
  • Control accuracy +/-1.0 ºC
  • K-type thermal couple inserted through the flange
Compliance
  • CE Certified
  • NRTL or CSA certification is available upon request