Computerized Mass Flow Controller (Max. 1000 SCCM) - MFC-COM
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Computerized Mass Flow Controller (Max. 1000 SCCM) - MFC-COM

Computerized Mass Flow Controller (Max. 1000 SCCM) - MFC-COM

Select Optional SCCM
From $2,495.95
Computerized Mass Flow Controller (Max. 1000 SCCM) - MFC-COM—
$2,495.95

The Story

MFC-A is a digital mass flow controller for MTI's CVD/PECVD/Graphene furnace to control the gas flowing rate for different research purposes.
  • This product did not have a display, it must be controlled by the computer using manufacturer software.
  • Digital Mass Flow Controller for Gas Control Systems
  • Cost effective, High accuracy and fast response, Multi-gas, Auto-zero, Compatible interfaces.
  • Used for accurately controlling and measuring the gas flow rate of high pressure.
  • Ideal for CVD and other gas mixture applications.
  • International standard DB15 pin fitting; connects to MTI Furnaces with Swagelok1/4 fitting.
Specification

Full scale range (N2)

( 0100,200,500,1000)SCCM

Other range can be customized at extra cost, please email to [email protected]

Accuracy

±1.0% S.P. (≥35% F.S.)

±0.35% F.S.(35% F.S.)

Repeatability

±0.2% FS

Linearity

±0.5% FS

Response Time

≤1sec

Valve Rest Position

Normally Closed or Normally Open

Temperature Coefficient

Zero: ≤±0.05% F.S./

Span: ≤±0.1% F.S.≤30 SLM

Span: ≤±0.2% F.S.30 SLM

Zero Drift

0.6%F.S. per year without autozero

Surface Finish(Ra)

25Ra

Operation Temperature

545

Communication Interface for input Signal

Digital: RS485

DeviceNetTM

Analog:(05)VDC or (420)mA

Communication Interface for Output Signal

Digital: RS485

DeviceNetTM

Analog:(05)VDC or (420)mA

Power Supply

±11 ~ ±16 VDC or +11 ~ +28 VDC(400mA)

Electronic Connector

D-sub 9 pins male, D-sub 15 pins male,

DeviceNetTM male

Differential Pressure

(0.050.35) Mpa≤10000SCCM

(0.10.35) Mpa20000SCCM,30000SCCM

(0.20.45) Mpa50000SCCM

Max Pressure

3MPa

Leak integrity

1×10-9 atm·cc / sec He1×10-10 Pa·m3 / sec He

Seals Materials

Viton; Neoprene

Surface Chemistry (EP only)

——

Fittings

Swagelok1/4”

Weight

1kg

Computerized Mass Flow Controller (Max. 1000 SCCM) - MFC-COM - Image 2

Details & Craftsmanship

Every detail has been carefully considered to bring you the perfect product.

Computerized Mass Flow Controller (Max. 1000 SCCM) - MFC-COM - Image 3

Details & Craftsmanship

Every detail has been carefully considered to bring you the perfect product.

Description

MFC-A is a digital mass flow controller for MTI's CVD/PECVD/Graphene furnace to control the gas flowing rate for different research purposes.
  • This product did not have a display, it must be controlled by the computer using manufacturer software.
  • Digital Mass Flow Controller for Gas Control Systems
  • Cost effective, High accuracy and fast response, Multi-gas, Auto-zero, Compatible interfaces.
  • Used for accurately controlling and measuring the gas flow rate of high pressure.
  • Ideal for CVD and other gas mixture applications.
  • International standard DB15 pin fitting; connects to MTI Furnaces with Swagelok1/4 fitting.
Specification

Full scale range (N2)

( 0100,200,500,1000)SCCM

Other range can be customized at extra cost, please email to [email protected]

Accuracy

±1.0% S.P. (≥35% F.S.)

±0.35% F.S.(35% F.S.)

Repeatability

±0.2% FS

Linearity

±0.5% FS

Response Time

≤1sec

Valve Rest Position

Normally Closed or Normally Open

Temperature Coefficient

Zero: ≤±0.05% F.S./

Span: ≤±0.1% F.S.≤30 SLM

Span: ≤±0.2% F.S.30 SLM

Zero Drift

0.6%F.S. per year without autozero

Surface Finish(Ra)

25Ra

Operation Temperature

545

Communication Interface for input Signal

Digital: RS485

DeviceNetTM

Analog:(05)VDC or (420)mA

Communication Interface for Output Signal

Digital: RS485

DeviceNetTM

Analog:(05)VDC or (420)mA

Power Supply

±11 ~ ±16 VDC or +11 ~ +28 VDC(400mA)

Electronic Connector

D-sub 9 pins male, D-sub 15 pins male,

DeviceNetTM male

Differential Pressure

(0.050.35) Mpa≤10000SCCM

(0.10.35) Mpa20000SCCM,30000SCCM

(0.20.45) Mpa50000SCCM

Max Pressure

3MPa

Leak integrity

1×10-9 atm·cc / sec He1×10-10 Pa·m3 / sec He

Seals Materials

Viton; Neoprene

Surface Chemistry (EP only)

——

Fittings

Swagelok1/4”

Weight

1kg

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