DC Magnetron Sputtering Coater for Noble Metals - VTC-16-D
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DC Magnetron Sputtering Coater for Noble Metals - VTC-16-D

DC Magnetron Sputtering Coater for Noble Metals - VTC-16-D

$5,244.75

Original: $14,985.00

-65%
DC Magnetron Sputtering Coater for Noble Metals - VTC-16-D—

$14,985.00

$5,244.75

The Story

VTC-16-D is a desktop magnetron sputtering coater with a 2" sputtering head and a height adjustable sample holder. It is designed for thin-film coating for noble metals (Au, Ag, Pt), especially for coating conductive film for SEM samples. To sputter active metals, such as Al, Mg, Zn, or Carbon target, please consider the High Power magnetron sputtering coater or thermal evaporation coater

SPECIFICATIONS
Power
  • 220 VAC 50/60Hz, 200W
  • 110VAC power is available by using a 750 W transformer (15 A fuse). The transformer is sold separately
Sputtering Head
  • 2" diameter
  • 500 VDC
  • 0 - 50 mA (max.) adjustable sputtering current
  • Over-current protection
  • Manual shutter for pre-sputtering cleaning. 
Sputtering Time
  • 1 -120 seconds adjustable

Sputtering Target

(Optional)
  • 2" gold (4N) target
  • Compact magnetron sputtering coater, for coating conductive noble metal film on SEM samples (Au, Ag, Pt)
Vacuum Chamber
  • Quartz glass tube, 165 mm OD. x 150 mm ID x 150 mm Height
  • KF25 port for vacuum pump. 
  • Ultimate pressure is about 1 Pa
Pirani Vacuum Gauge
  • Range: 1e-4 - 1000mbar (1e-4 - 750 torr)
  • Accuracy:
    • 1000 - 20mbar, 3% of reading
    • 20 - 0.002mbar, 2% of reading
  • Repeatability: 2% of reading
Sample Stage
  • 2" diameter
  • height adjustable, 25 - 70 mm from the sample to the target
Vacuum pump (optional)
  • The double stage rotary vane pump EQ-FYP is recommended. 
Gas Inlet
  • One 1/4" compression tube fitting as the gas inlet. 
  • One leak valve to adjust the leak rate of Ar gas. 
Compliance
  • CE Certified
  • NRTL certification is NOT available temporarily.
Application Notes
  • To use the sputtering coater inside the glove box, please consider order VTC-STX-XX.
  • For active metals, such as Al, Mg, Zn target, please consider our high power magnetron sputtering coater or thermal evaporation coater.

 

 

DC Magnetron Sputtering Coater for Noble Metals - VTC-16-D - Image 2

Details & Craftsmanship

Every detail has been carefully considered to bring you the perfect product.

DC Magnetron Sputtering Coater for Noble Metals - VTC-16-D - Image 3

Details & Craftsmanship

Every detail has been carefully considered to bring you the perfect product.

DC Magnetron Sputtering Coater for Noble Metals - VTC-16-D - Image 4

Details & Craftsmanship

Every detail has been carefully considered to bring you the perfect product.

Description

VTC-16-D is a desktop magnetron sputtering coater with a 2" sputtering head and a height adjustable sample holder. It is designed for thin-film coating for noble metals (Au, Ag, Pt), especially for coating conductive film for SEM samples. To sputter active metals, such as Al, Mg, Zn, or Carbon target, please consider the High Power magnetron sputtering coater or thermal evaporation coater

SPECIFICATIONS
Power
  • 220 VAC 50/60Hz, 200W
  • 110VAC power is available by using a 750 W transformer (15 A fuse). The transformer is sold separately
Sputtering Head
  • 2" diameter
  • 500 VDC
  • 0 - 50 mA (max.) adjustable sputtering current
  • Over-current protection
  • Manual shutter for pre-sputtering cleaning. 
Sputtering Time
  • 1 -120 seconds adjustable

Sputtering Target

(Optional)
  • 2" gold (4N) target
  • Compact magnetron sputtering coater, for coating conductive noble metal film on SEM samples (Au, Ag, Pt)
Vacuum Chamber
  • Quartz glass tube, 165 mm OD. x 150 mm ID x 150 mm Height
  • KF25 port for vacuum pump. 
  • Ultimate pressure is about 1 Pa
Pirani Vacuum Gauge
  • Range: 1e-4 - 1000mbar (1e-4 - 750 torr)
  • Accuracy:
    • 1000 - 20mbar, 3% of reading
    • 20 - 0.002mbar, 2% of reading
  • Repeatability: 2% of reading
Sample Stage
  • 2" diameter
  • height adjustable, 25 - 70 mm from the sample to the target
Vacuum pump (optional)
  • The double stage rotary vane pump EQ-FYP is recommended. 
Gas Inlet
  • One 1/4" compression tube fitting as the gas inlet. 
  • One leak valve to adjust the leak rate of Ar gas. 
Compliance
  • CE Certified
  • NRTL certification is NOT available temporarily.
Application Notes
  • To use the sputtering coater inside the glove box, please consider order VTC-STX-XX.
  • For active metals, such as Al, Mg, Zn target, please consider our high power magnetron sputtering coater or thermal evaporation coater.